The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 26, 1983

Filed:

Jul. 09, 1981
Applicant:
Inventor:

Jorma O Antson, Espoo, FI;

Assignee:

Oy LohJa AB, Virkkala, FI;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
29590 ; 29587 ; 29591 ;
Abstract

Disclosed herein is a method for making electrically conductive penetrations into thin films and equivalent. The penetrations reach from the outside surface of the thin films to be grown by means of depostion as layers at a temperature of 200.degree. to 700.degree. C. to an interior electrode layer. According to the method a desired quantity of a metallic substance whose melting point is lower and boiling point higher than the growing temperature of the thin film layers is placed on the interior electrode layer within each desired penetration area before the preparation of the following layer. Hereby the metallic substance, when being molten, prevents the formation of layers in the area above itself and, when hardening, forms the desired electrically conductive penetrations.


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