The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 1983
Filed:
Jun. 23, 1982
Applicant:
Inventors:
Walter Herwig, Bad Soden, DE;
Kurt Klupfel, Wiesbaden, DE;
Helga Sikora, Wiesbaden, DE;
Heide Sprengel, Wiesbaden, DE;
Assignee:
Hoechst Aktiengesellschaft, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430329 ; 134-2 ; 134-3 ; 204 15 ; 427 98 ; 427327 ; 430331 ;
Abstract
A process and an aqueous treatment solution for cleaning copper surfaces, in particular for removing residues of photoresist layers, which residues still adhere after development to the cleared copper areas, are described. The solution contains a water-soluble aliphatic sulfonic acid having 8 to 30 carbon atoms or a water-soluble salt thereof.