The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 1983
Filed:
Mar. 12, 1980
Applicant:
Inventors:
Kazuo Shii, Asahimura, JP;
Toshiyuki Ohashi, Katsuta, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250311 ;
Abstract
An electron microscope is disclosed in which an electron beam impinges upon a specimen at a predetermined angle of incidence, the incident azimuth of the electron beam incident upon the specimen is continuously changed, and the electron beam having passed through the specimen is made large in angular spread by a magnifying lens system and then projected onto a viewing screen to form a visual enlarged image of the specimen on the viewing screen; and in which the astigmatism of the magnifying lens system is shown on the viewing screen as the blur of the image.