The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 1983
Filed:
Jul. 16, 1981
Reinhard Behn, Munich, DE;
Siemens Aktiengesellschaft, Berlin and Munich, DE;
Abstract
Method for producing laminated capacitors, including a rotatable drum having a periphery and recesses formed therein, carriers disposed on the drum in the recesses defining a setting range on the periphery of the drum, a first vacuum chamber for metal layer deposition, a second vacuum chamber for insulating material layer deposition, means for supplying a vapor jet through a path in the first vacuum chamber and a shielding mask for shielding the carriers from the vapor jet, which includes shielding off the carriers from the vapor jet with the shielding mask before vapor deposition, alternatingly conducting the carriers on the drum through the first and second vacuum chambers, removing the shielding mask from the vapor jet path after a given number of revolutions of the drum for the period during which the setting range on the periphery of drum rotates through the first zone, and reintroducing the shielding mask in the vapor jet path after the last metal layer has been deposited during the rotation through the setting range, and a device for carrying out the method.