The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 1983
Filed:
Sep. 03, 1980
Osamu Takeshita, Hikone, JP;
Takeshi Takada, Shiga, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Abstract
An apparatus to mount wafers for sublimation plating on a rotary type wafer holding dome having more than one wafer mounting seat of window type on its circumference comprising a wafer cassette that holds many sheets of wafers piled up with spacing and holding pieces in-between and is driven up-and-down at the same intervals as wafer mounting, a rotary arm having a sucker on the top end with the said wafer mounting seats on its rotation locus, and a conveyor mechanism to receive a piece of wafer at the end of the wafer cassette and to transfer the wafer to a position on the other rotation locus at the top end of the said rotary arm. The rotation of the wafer holding dome at the same intervals as the wafer mounting seats, up-down motion of the said wafer cassette, the conveyor mechanism and also the rotational driving of the rotary arm are controlled by interlocked sequence to enable automatic and effective loading and unloading between the wafer cassette and wafer holding dome without any contamination or damage to the wafers.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile