The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 1983
Filed:
Jun. 14, 1982
Bogdan Zega, Geneva, CH;
Battelle Development Corporation, Columbus, OH (US);
Abstract
In this cylindrical, magnetically-enhanced, sputtering cathode, the magnetic field at the cathode target is generated by applying an electric current through a hollow electrical conductor disposed within a tubular target, so that the electric current flowing along this conductor induces circular magnetic lines concentrically around its axis. By biasing negatively the tubular target immersed in a low pressure gas, a glow discharge is generated. Electrons, emitted from the target surface are accelerated radially by the electric field, but deviated perpendicularly by the magnetic field. The resulting motion is confined in a spirally-shaped area centered on the conductor axis.