The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 1983
Filed:
Sep. 15, 1981
Applicant:
Inventors:
Jon C Goldman, Orange, CA (US);
Robert E Rappaport, Westminster, CA (US);
Assignee:
Thermco Products Corporation, Orange, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
F27B / ; F27D / ; B05C / ;
U.S. Cl.
CPC ...
432198 ; 118715 ; 118724 ; 427 85 ; 432 55 ;
Abstract
A gas flow control system in which several constituent gases are mixed and the mixture delivered through controlled injectors to a processing zone. Mass flow controllers control the injector flows with one of the controllers being a master and the other being slaved to provide a selected percentage of the flow through the master controller. The gas mix is regulated by a mass flow controller on one of the constituents and a flow meter on the other, the flow meter producing an error signal which is used to readjust the total flow through the injectors by control of the master injector flow controller.