The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 1983
Filed:
Feb. 19, 1980
Applicant:
Inventor:
Karl A Schulke, Neuberg, DE;
Assignee:
Heraeus Quarzschmelze GmbH, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
1375276 ; 118715 ; 137535 ;
Abstract
In a refractory protective tube for the heat treatment of semiconductor components which is constricted at one end and at such constricted end is provided with a treating or working gas inlet, said tube having opposite to said gas inlet a closed end provided with a gas outlet, the improvement for the prevention of back diffusion of ambient air wherein said closed end is closed by a cover which is fastened to a holding bracket which is movably suspended from the tube.