The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1982
Filed:
Mar. 16, 1981
Applicant:
Inventor:
Robert W Keyes, Ossining, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H / ; H03H / ; H01L / ;
U.S. Cl.
CPC ...
333155 ; 3103 / ; 333195 ; 357 26 ;
Abstract
Surface acoustic wave devices with selectable performance parameters such as having a temperature coefficient of zero, may be fabricated employing a monocrystalline semiconductor substrate with a combination of appropriate doping and crystallographic orientation both with respect to the surface and the direction of propagation. Monocrystalline silicon doped with phosphorous to the order of 2.times.10.sup.19 atoms per cc, exhibits a zero temperature coefficient at 300.degree. Kelvin for acoustic waves propagating in the [110] crystallographic direction on a [110] substrate.