The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1982
Filed:
Oct. 14, 1980
Karl-Heinz Steigerwald, Starnberg, DE;
Peter Anderl, Munich, DE;
Erwin Kappelsberger, Munich, DE;
Clauspeter Monch, Grafrath, DE;
Dieter Konig, Munich, DE;
Wilheim Scheffels, Puchheim, DE;
Messer Griesheim GmbH, , DE;
Abstract
A system for sealing the working vacuum chamber of a charged particle beam machine which is movable with respect to a workpiece is disclosed. The system includes a housing with a central compartment having wire-shaped elements urged against the workpiece to provide a seal therebetween, and lateral compartments, each having a packing of sealing material which is biased against the workpiece surface of a spring arrangement. Rollers and a flexible lip seal arrangement having a flexible sheath of synthetic rubber are also disclosed.