The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 1982
Filed:
Oct. 05, 1981
Applicant:
Inventor:
Yutaka Okinaka, Madison, NJ (US);
Assignee:
Bell Telephone Laboratories, Incorporated, Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; C23F / ;
U.S. Cl.
CPC ...
1566591 ; 156656 ; 156665 ; 252 795 ;
Abstract
A process is described for making devices with aluminum-copper alloy in which the aluminum-copper alloy is etched in a basic solution. This procedure is particularly applicable to memory devices and bubble memory devices containing magnetic material (i.e., permalloy) where acid etches cannot be used. Excellent results are obtained with the basic etching solution. In particular the aluminum-copper alloy is completely removed and etching rates are sufficiently fast for commercial manufacturing operations.