The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 1982
Filed:
Feb. 13, 1981
Kazumichi Ogura, Akishimashi, JP;
Nihon Denshi Kabushiki Kaisha, Tokyo, JP;
Abstract
A specimen observation apparatus for obtaining both an optical microscope image and a scanning electron microscope image simultaneously from one specimen. The apparatus includes a transparent glass plate having a transparent electrically conductive layer on a surface thereof for supporting the specimen in a vacuum column. The glass plate seals off one end of the vacuum column. The specimen position is illuminated with light and an electron beam along the same optical axis in the vacuum column to create both an optical microscope image with the light passing through the specimen and a scanning electron microscope image based on information obtained by scanning the electron beam over the specimen. The glass plate, while sealing one end of the vacuum column, is movably disposed about the optical axis. An optical microscope is located outside the vacuum column near to the glass plate.