The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 1982
Filed:
May. 14, 1981
Applicant:
Inventors:
Adam Heller, Bridgewater, NJ (US);
Richard G Vadimsky, Somerville, NJ (US);
Assignee:
Bell Telephone Laboratories, Incorporated, Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430272 ; 1566591 ; 156662 ; 427 85 ; 430270 ; 430275 ; 430311 ; 430313 ; 430317 ; 430318 ; 430321 ; 430325 ; 430564 ;
Abstract
Fabrication of a resist, useful for high resolution pattern delineation and having a silver containing layer on a glassy material, produces better results when the sensitizing bath contains both potassium silver cyanide and a metal cyanide complex capable of providing CN.sup.- ions to shift the equilibrium of Ag(CN).sub.2.sup.- .revreaction.AgCN+CN.sup.- to the left.