Apparatus for sequentially transporting containers

Abstract

Apparatus for transferring and manipulating a plurality of containers in a sequence is disclosed including a mechanical manipulator arm 10 having a gripping device B which automatically picks up a container at a fixed pickup position P and transfers it to a processing station. At a processing station X, the container is loaded with silicon wafers and thereafter returned by the arm to the fixed position P at the pickup and return station Y. A plurality of the containers may be processed in sequence from the fixed pickup position by providing a movable carriage 58 upon which container pedestal platforms 54 and 56 are supported, at least one of which is an elevator platform. The platforms include abutments 54c and 56c for properly positioning the containers for accurate pickup by the manipulator arm. Sensing switches may be provided for sensing movements of the arm 10, carriage 58, and elevator platform 56 whereby the entire apparatus may be controlled automatically avoiding the need to handle the wafers manually to reduce the possibility of contamination.