The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 03, 1982

Filed:

Oct. 30, 1980
Applicant:
Inventors:

Erwin Jacobs, Vaterstetten, DE;

Ulrich Schwabe, Munich, DE;

Dezso Takacs, Munich, DE;

Assignee:

Siemens Aktiengesellschaft, Berlin & Munich, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J / ; H01L / ;
U.S. Cl.
CPC ...
2957 / ; 29571 ; 148187 ; 357 23 ; 357 91 ;
Abstract

A method for manufacturing MNOS memory transistors with very short channel lengths in silicon gate technology. In a substrate of a first semiconductor type, source and drain zones of MNOS and MOS components of a second conductivity type opposite the first conductivity type are provided. The edges of gate electrodes, with reference to the plane of the substrate surface, lie perpendicularly and self-adjusting over the edges of the source and drain zones, whereby the source and drain zones generated in the substrate are manufactured by means of ion implantation upon employment of the gate electrodes as the implantation mask.


Find Patent Forward Citations

Jacobs, Erwin. (1982). Method of making very short channel length mnos and mos devices by (U.S. Patent No. 4342149). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4342149

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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