The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1982
Filed:
Oct. 30, 1980
Applicant:
Inventor:
John W Bonn, Columbus, OH (US);
Assignee:
CVI Incorporated, Columbus, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
62 555 ; 55269 ; 62100 ; 62268 ; 417901 ;
Abstract
Cryopump apparatus for evacuating very large chambers to ultra high vacuums includes cryogenic panels alternating with radiation shields having a unique Z-configuration which optically blind the panels. The panels and shields are supported by and housed within structure having specific components slidable along one another to thereby permit necessary movement of the components when the apparatus is subjected to cool-down or warm-up. The apparatus is characterized by very high pumping speeds and is capable of cryopumping from both sides thereof.