The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 1982
Filed:
Apr. 20, 1981
Grzegorz Kaganowicz, Princeton, NJ (US);
John W Robinson, Levittown, PA (US);
RCA Corporation, New York, NY (US);
Abstract
A method for preparing an abrasive SiO.sub.x coating, wherein 1.ltoreq..times..ltoreq.2, on a substrate by glow discharge deposition wherein the deposition on the substrate in a vacuum chamber is interrupted before the desired final SiO.sub.x coating thickness is obtained. SiH.sub.4 and N.sub.2 O are subjected to a glow discharge and SiO.sub.x is deposited onto the substrate. The deposition is interrupted, SiH.sub.4 is removed from the vacuum chamber and the SiO.sub.x coating is exposed to oxygen. These steps are repeated until the desired final SiO.sub.x coating thickness is obtained.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile