The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 1982
Filed:
Nov. 19, 1980
Tokyo Shibaura Denki Kabushiki Kaisha, Kawasaki, JP;
Abstract
There is provided an apparatus for processing a surface of an object to be processed by utilizing microwave plasma within a plasma-producing chamber, which comprises a microwave power-generating means; a wave guide for transmitting microwaves generated from said microwave power-generating means; a closed vessel constituting the plasma-producing chamber separated from said wave guide by a separating means; an antenna for transmitting microwaves, one end thereof protruding into the wave guide and another end thereof protruding into the closed vessel and a supporting means, for holding or supporting the electroconductive object to be processed, provided within the closed vessel and so attached to the antenna that the antenna and the electroconductive object may be electrically connected to each other.