The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 13, 1982

Filed:

Jul. 25, 1977
Applicant:
Inventor:

Lowell A Noble, Monte Sereno, CA (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
156601 ; 156646 ; 2041 / ;
Abstract

A process for smoothing surfaces of crystalline materials such as sapphire or the like is disclosed which is capable of producing surfaces which are near atomically smooth. The process comprises the steps of substantially atomically removing crystalline material from the surface to be smoothed at a given rate and simultaneously substantially atomically depositing crystalline material on the surface to be smoothed at an independently controlled rate not greater than the given rate of removal. Various embodiments of the process are described in which combinations of evaporation, sputtering, gaseous chemical reaction and reflection of removed material are used to provide the substantially atomic removal and deposition of materials according to this invention.


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