The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 1982
Filed:
Oct. 12, 1979
Applicant:
Inventors:
Haruyoshi Yamanaka, Takarazuka, JP;
Masaru Kazumura, Takatsuki, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Kadoma, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C / ;
U.S. Cl.
CPC ...
118421 ; 118425 ; 118429 ;
Abstract
An apparatus for making semiconductor devices comprising a block having a slot hole for holding a semiconductor substrate therein, a solution container which has a predetermined number of holes to contain semiconductor solutions therein and is slidably disposed on said block, characterized in that said slot hole has walls having a considerable angle with respect to a horizontal plane and has a solution inlet at the top part of said slot hole and a solution outlet at the bottom part of said slot hole, and has a means to hold said substrate with its principal face substantially parallel to said walls.