The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 1982
Filed:
Nov. 04, 1980
William R Hunter, Garland, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A method of fabricating deep grooves having submicron widths in a semiconductor substrate. A pattern of submicron oxidation masking elements formed on the substrate surface serves as an oxidation mask for a thick oxide layer. After forming the oxide layer, the insulating elements are removed to form a pattern of submicron width openings in the oxide extending to the substrate. A selective anisotropic dry etch is then used to form deep, narrow grooves in the substrate conforming to the pattern of openings which are filled with an insulating material formed by thermal oxidation, chemical vapor deposition, or a combination thereof. This process is used to provide deep dielectric isolation between active areas in high density integrated circuits.