The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 1982
Filed:
Dec. 02, 1980
Akira Sasano, Hinodemachi, JP;
Toshio Nakano, Hinodemachi, JP;
Ken Tsutsui, Hachioji, JP;
Chushiro Kusano, Kokubunji, JP;
Tadaaki Hirai, Koganei, JP;
Eiichi Maruyama, Kodaira, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi Denshi Kabushiki Kaisha, Tokyo, JP;
Abstract
A method of manufacturing a target of an image pickup tube comprising the steps of: forming a plurality of groups of transparent conductive signal electrodes on a transparent insulating base plate; forming a first layer on at least a portion constituting an image area of the image pickup tube, said first layer being substantially insoluble in etching liquid used for etching an insulating layer to constitute an intermediate layer insulator in a double layered interconnection structure; forming, after formation of said first layer, an insulating layer to constitute said intermediate-layer insulator; removing a predetermined portion of said insulating layer, removing said first layer together with said insulating layer located thereon; forming bus bars; and forming a photoconductive layer on said plurality of groups of the transparent conductive signal electrodes. This invention provides an excellent method for mass production.