The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 1982
Filed:
Mar. 18, 1977
Applicant:
Inventor:
Alan G Flint, Los Gatos, CA (US);
Assignee:
GCA Corporation, Bedford, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
406 73 ; 406 72 ; 406 88 ; 118 50 ; 118 52 ; 118 54 ; 198339 ; 198344 ;
Abstract
A wafer processing system for spin processing photoresist liquid on a silicon wafer and automatically sequencing them through the processor includes a shuttle having upper and lower air bearing slides. The upper slide receives the wafer from a supply magazine and centers it on a rotating chuck and the lower slide of the shuttle receives the wafer from the chuck and allows it to be transferred to a receive track.