The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 1982
Filed:
Apr. 24, 1979
Applicant:
Inventor:
Charles F Morrison, Jr, Boulder, CO (US);
Assignee:
VAC-TEC Systems, Inc., Boulder, CO (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
2041 / ; 204298 ;
Abstract
A method and apparatus for establishing the magnetic field in a magnetically enhanced sputtering device wherein a predetermined plasma path is formed adjacent a layer of target material to be sputtered wherein a first component of the magnetic field is substantially perpendicular to the plasma path and a second component thereof is substantially parallel to the path. Various embodiments are described for generating the foregoing magnetic field components.