The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 1982
Filed:
Mar. 24, 1980
Ryozo Satoh, Yamato, JP;
Tel-Thermco Engineering Co., Ltd., Yokohama, JP;
Abstract
In an apparatus for thermal treatment of semiconductors in a treating gas, a cylindrical plug extends into a treating tube so as to substantially fill the treating tube, as far as the cylindrical plug extends into the treating tube, except for a clearance provided around the cylindrical plug, between the cylindrical plug and the treating tube, whereby formation of convection currents in the treating gas is prevented. The cylindrical plug may be separate from a sealing closure, integral with the sealing closure, or integral with the treating tube. If integral with the treating tube, the cylindrical plug has a tubular portion and a bottom portion, which plugs the tubular portion but is removable.