The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 1982
Filed:
Mar. 24, 1980
Ryozo Satoh, Yamato, JP;
Tel-Thermco Engineering Co., Ltd., Yokohama, JP;
Abstract
As used in an apparatus for thermal treatment of semiconductors, a treating tube has a flanged portion at one end, near an outlet for a treating gas, and a sealing closure has a cylindrical portion and a flanged portion. The flanged portion of the sealing closure is adapted to be interfitted with the flanged portion of the treating tube so as to seal said end. The sealing closure is removable so as to open said end. The cylindrical portion is adapted to be inserted into the treating tank through said end so as to substantially fill the treating tube, as far as the cylindrical portion extends into the tube, except for a clearance provided around the cylindrical portion, between the cylindrical portion and the treating tube, whereby formation of convection currents in the treating gas is prevented. The flanged portion of the treating tube, a hollow interior of the sealing closure, and the flanged portion of the sealing closure are open to an outer atmosphere when the flanged portions are interfitted.