The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 1982
Filed:
Feb. 27, 1980
Karl-Heinz Klatt, Julich-Stetternich, DE;
Eckerd Kussel, Duren, DE;
Kernforschungsanlage Julich GmbH, Julich, DE;
Abstract
Metal disks of alloys having a high ratio of tensile strength to specific gravity, such as copper-beryllium and aluminum-containing titanium alloys containing also molybdenum or vanadium or vanadium and chromium, are etched to produce arrays of rotor and stator vanes integral with a mounting rim for a turbomolecular pump. The vanes are set by twisting about a substantially radial axis in the mid-plane of the disk. The angle of set decreses by 35.degree. at the suction side to 10.degree. at the prevacuum side both for the rotor vane arrays and the stator vane arrays that are interleaved. High velocities of rotation and therefore high suction power and extremely low producible vacuum pressures are made possible.