The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 1981
Filed:
May. 09, 1980
Applicant:
Inventors:
Shinya Iida, Tama, JP;
Kazuyoshi Ueki, Ohme, JP;
Tatsumi Mizutani, Kokubunji, JP;
Hideo Komatsu, Hinodemachi, JP;
Kado Hirobe, Koganei, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; C23C / ; C23G / ; B08B / ;
U.S. Cl.
CPC ...
156643 ; 134-3 ; 134 28 ; 134 29 ; 134 30 ; 156646 ; 1566591 ; 156665 ; 2041 / ; 2041 / ; 252 791 ;
Abstract
Disclosed is a method for preventing corrosion of Al and Al alloys processed by the dry-etching method, which comprises (i) the step of sputtering Al or Al alloy in an ammonia-containing atmosphere and (ii) the step of washing the sputtered Al or Al alloy with an alkaline aqueous solution and then with water after termination of the step (i). According to this method, corrosion of Al or Al alloy by halogen element-containing substances stuck to Al or Al alloy during the dry-etching treatment can be effectively prevented.