The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 1981
Filed:
Dec. 22, 1977
Applicant:
Inventors:
Thomas M Frederiksen, San Jose, CA (US);
Joseph J Connolly, Jr, San Jose, CA (US);
Assignee:
National Semiconductor Corporation, Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324 / ; 2191 / ; 250491 ; 318640 ; 356152 ;
Abstract
A detector for application to integrated circuits useful in determining the alignment of a trimming laser. A metallization pattern is employed along with electrical detection circuitry to determine when the trimming laser becomes misaligned by a predetermined amount. The laser is precision aimed when the integrated circuit wafer is located in a step and repeat machine. As stepping continues the detector provides an indication when the cumulative error exceeds the predetermined value.