The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 1981

Filed:

Jun. 08, 1979
Applicant:
Inventor:

John C Greenwood, Harlow, GB;

Assignee:

ITT Industries, Inc., New York, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D / ;
U.S. Cl.
CPC ...
73651 ;
Abstract

Semiconductor transducer devices are provided, some being formed from a single crystal and having a flexible portion which is vibratable. Also a multi-element is disclosed which is a body including mechanical semiconductor resonator. The body has a transverse valley across its width. A comb-like array of flexible silicon cantilevers extend from one end of the body. Each cantilever is adapted to respond to a periodic force such that each has a different vibrational frequency. An alternative embodiment includes an accelerometer having a block with a three cantilever array with a semiconductor filament fixed in tension between each adjacent pair. The middle cantilever is longer than the other two. A further alternative employs elements to support a crystal at two nodal points of vibration.


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