The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 1981
Filed:
Feb. 29, 1980
Applicant:
Inventor:
Roderick K Watts, Summit, NJ (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B / ;
U.S. Cl.
CPC ...
318640 ; 250548 ; 356400 ;
Abstract
A method of aligning an x-ray mask to a pattern on a semiconductor slice utilizing an infrared light source and an alignment pattern pair on the mask and slice to automatically and precisely position the x-ray mask on the semiconductor slice.