The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 1981
Filed:
Oct. 31, 1978
Applicant:
Inventors:
Terry L Jones, Springfield, VA (US);
Brian S Miller, Alexandria, VA (US);
Assignee:
The United States of America as represented by the Secretary of the Army, Washington, DC (US);
Primary Examiner:
Int. Cl.
CPC ...
B05D / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
427 88 ; 29572 ; 156655 ; 1566591 ; 156662 ; 156667 ; 357 30 ; 357 55 ; 430313 ; 430317 ; 427 431 ; 427 77 ;
Abstract
An insulating layer on the surface of a slab of photo-responsive semicondor material is treated to produce a pattern of projections or mesas. The treatment includes the steps of producing a mask on the insulating layer using electron-beam lithography, etching holes in the layer through the mask, stripping the mask, and finishing with the usual electrical conductors on the insulating layer. An alternate embodiment etches the surface of the slab to produce a scrabrous surface, then coats with aluminum oxide and electrical conductors.