The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 1981
Filed:
Dec. 03, 1979
Applicant:
Inventors:
Holger Hinkel, Boeblingen, DE;
Georg Kraus, Wildberg, DE;
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
313230 ; 250427 ; 313359 ; 3132314 ; 3151118 ;
Abstract
A direct heated rod-shaped cathode for an ion source is provided with a region of reduced cross-section adjacent its negative end to maximize the path length of electron movement within the discharge chamber and to provide effective control of the cathode resistance in a region that is relatively free of sputtering erosion during use.