The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 1981
Filed:
May. 12, 1980
Applicant:
Inventor:
William T Silfvast, Holmdel, NJ (US);
Assignee:
Bell Telephone Laboratories, Incorporated, Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ;
U.S. Cl.
CPC ...
427 42 ; 427 531 ; 2191 / ; 2191 / ; 2191 / ; 2191 / ; 2191 / ;
Abstract
Implantation of a particle flux (200), for example a laser produced particle flux, upon a substrate (5) is enhanced by premelting the substrate surface with a beam of radiation (110) from a pulsed high energy source (2) such as a laser source. The premelting is provided prior to the arrival of the particle flux in order that the particle flux impinge upon an area of the substrate which is melted.