The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 1981
Filed:
Apr. 30, 1979
Applicant:
Inventor:
Nicholas Guarino, Arlington, MA (US);
Assignee:
Varian Associates, Inc., Palo Alto, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250440 ; 250442 ;
Abstract
Apparatus comprising a work table movable along orthogonal axes, and optical means, including orthogonal mirrors movable with the table, for sensing the positions of the table along the axes, featuring an improvement wherein the table comprises a solid block of metal, means are provided to secure a workpiece to move with the block, and two orthogonal external surfaces of the block are polished to provide the mirrors.