The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 1981
Filed:
Jan. 28, 1980
Applicant:
Inventors:
Rainer Buhl, Sargans, CH;
Hans Signer, Oberschaan, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118723 ; 204298 ;
Abstract
A vacuum evaporator includes a housing defining a vacuum chamber which has mounting for an evaporative material and an electrode spaced from the evaporative material which is arranged adjacent the support for a substrate to be coated. A screening element is located between the electrode and the substrate support in the vacuum chamber. The vacuum chamber has a gas inlet port through which gases may be passed.