The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 1981

Filed:

Feb. 21, 1979
Applicant:
Inventors:

Moiz M Beguwala, Placentia, CA (US);

Francis M Erdmann, Anaheim, CA (US);

Assignee:

Rockwell International Corporation, El Segundo, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
29571 ; 29591 ; 148-15 ; 148187 ; 357 41 ; 357 23 ;
Abstract

There is shown and described a memory array using MNOS/MOS transistors. The memory devices are nonvolatile, metal-nitride-oxide-semiconductor (MNOS) variable threshold voltage transistors and the metal-oxide semiconductor (MOS) input-output devices exhibit fixed threshold voltages. The MOS devices are fabricated first and the MNOS memory devices are fabricated thereafter. This memory gate last (MGL) arrangement eliminates the need for high temperature process steps after the formation of the MNOS device gate dielectric in the array devices. This operation results in an MNOS/MOS memory array which exhibits excellent ionizing radiation hardness characteristics as well as memory properties which are improved over present radiation hardened MNOS/MOS arrays.


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