The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 1981
Filed:
Nov. 26, 1979
Applicant:
Inventors:
Ernest J Funk, Cupertino, CA (US);
Thomas Wing, Woodland Hills, CA (US);
Jack C Lane, Saratoga, CA (US);
Edward S Westbrook, IV, Saratoga, CA (US);
Assignee:
Quintel Corporation, San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B / ;
U.S. Cl.
CPC ...
355 73 ; 269 21 ; 269310 ; 279-3 ; 355 79 ;
Abstract
A locking device for use in the chuck of an optical alignment and exposure apparatus is disclosed. The locking device comprises a plurality of flat, flexible blades fastened in pairs to a chuck plate in the chuck. Between each pair of blades there is a stationary element fastened to a base member in the chuck. Vacuum cups are fastened to the blades so that the blades are clamped tightly against the stationary element when the vacuum cups are evacuated.