The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 1981
Filed:
Nov. 08, 1978
Applicant:
Inventor:
William R Cady, Scotia, NY (US);
Assignee:
General Electric Co., Schenectady, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01G / ; H01L / ;
U.S. Cl.
CPC ...
29 2542 ; 29579 ; 156653 ; 156656 ; 156657 ; 1566591 ; 156662 ; 357 26 ; 357 51 ;
Abstract
An array of electrostatic transducers is fabricated on a monolithic integrated circuit chip having provision for detection, amplification, and signal processing of received echoes. The transducer is multilayered with the form of a parallel plate capacitor, and is made by laterally etching an insulating layer through a small hole in the overlying layer to create a void region, then depositing a sealing layer to seal the etch holes. The upper metallic layers cover the transducer array and other monolithic circuitry and are etched to be interconnections for the various components.