The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 1981
Filed:
Sep. 17, 1979
Steven N Lee, Irvine, CA (US);
Rockwell International Corporation, El Segundo, CA (US);
Abstract
A boat for use in wafer processing technology such as associated with semiconductor wafers. The boat consists of a relatively flat bottom plate having a plurality of substantially parallel V-cut notches therein on which the bottom of the wafer rests and two parallel side rails disposed above and on either side of the flat bottom plate for holding the sides of the wafer. The two side rails includes a plurality of opposed U-shaped notches cut in parallel along the inner surface of the side rails for movably securing the opposite side edges of the wafer placed in the boat. Each pair of opposed U-shaped notches being offset with respect to a V-cut notch operatively associated therewith. Such boats are applicable to wafer handling areas including oxidation, diffusion, low pressure chemical vapor deposition (LPCVD), plasma etching, chemical etching, photoresist coating, baking, stripping, ultrasonic cleaning, and other automatic wafer handling operations. In addition to applicability to semiconductor processing technology, the boat is also applicable to other electronic processing technology such as the processing of magnetic bubble substrate materials.