The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 17, 1981

Filed:

Oct. 02, 1979
Applicant:
Inventors:

Raymond V Johnson, Tequesta, FL (US);

Dennis P Biondi, Palm Beach Gardens, FL (US);

Assignee:

RCA Corp., New York, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; F27D / ; F27D / ; B05C / ;
U.S. Cl.
CPC ...
118719 ; 118724 ; 432 65 ; 432 83 ;
Abstract

A diffusion furnace having particular utility in the processing of SOS devices wherein a temperature gradient, per unit length of furnace tube, is provided at a section of a reaction tube extending between the furnace and the scavenger and load-unload chambers in order to minimize the thermal shock to which a sapphire wafer may be subject, either at the commencement of processing when the wafer is first introduced into the furnace or at the conclusion of the processing as the wafer is being withdrawn from the furnace.


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Johnson, Raymond. (1981). Temperature gradient means in reactor tube of vapor deposition apparatus (U.S. Patent No. 4256052). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4256052

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