The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 1981
Filed:
Oct. 05, 1978
Applicant:
Inventors:
Akiyoshi Suzki, Tokyo, JP;
Ichiro Kano, Yokohama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
350 91 ; 356401 ; 350-68 ; 350370 ; 350401 ;
Abstract
A photoelectric detecting device in which a photoelectric detecting system for scanning a surface to be inspected by a light beam and for receiving the light from the inspected surface by a photoelectric detector is partly common to an observation optical system for illuminating the inspected surface with an illuminating light and for observing the inspected surface. The device has a dichroic mirror and a polarizing beam splitter, whereby photoelectric detection is effected without loss of light and without adverse effect of the illuminating light.