The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 1981
Filed:
Aug. 03, 1979
Applicant:
Inventor:
Theodore Watkin, Stamford, CT (US);
Assignee:
The Perkin-Elmer Corporation, Norwalk, CT (US);
Primary Examiner:
Int. Cl.
CPC ...
G03B / ;
U.S. Cl.
CPC ...
353114 ; 353120 ; 353121 ; 353118 ;
Abstract
There is disclosed a system for storing a projection mask of the type used for printing integrated circuit patterns on silicon wafers. A special cassette package permits the mask to be stored in a clean sealed environment. A delivery system transports the sealed cassette into an optical projection instrument wherein the cassette is opened and the mask advanced to the projection stage. After projection, the mask is returned and automatically sealed into the cassette. The cassette may be evacuated or, alternatively, filled with a clean gas. The mask sealed in the cassette can then be stored until its use is again required.