The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 1980
Filed:
Apr. 16, 1979
Applicant:
Inventors:
Hans P Feuerbaum, Munich, DE;
Johann Otto, Munich, DE;
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250457 ; 250311 ; 2504 / ;
Abstract
A scanning electron microscope with an electron optical column and a sample chamber for a test sample disposed therein in a vacuum, in which the sample holder forms, directly or indirectly, an hermetic seal for the sample chamber. The electron-optical column is preferably suspended underneath the sample chamber, and the sample holder or its base form a cover for the sample chamber permitting simple and troublefree contact with the sample. Use of the electron microscope for the testing of integrated circuits is disclosed.