The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 1980
Filed:
Oct. 16, 1978
Richard H Winings, Berks County, PA (US);
Western Electric Company, Inc., New York, NY (US);
Abstract
PLanar articles such as silicon wafers 40 are removably mounted onto a flat microcellular polyurethane surface layer 48 of a carrier 30 to permit an exposed surface 42 of each wafer 40 to be polished. To retain the wafers 40 against lateral polishing forces on the carrier 30 the surface of the layer 48 is treated with a dilute organic acid prior to mounting the wafers 40. The treatment involves contacting the surface of the layer 48 with the acid selected from the group consisting of citric, propionic, formic and acetic acids. The surface of the layer 48 is thoroughly wetted with the acid after which all excess acid is scraped from the surface. The wafers 40 are then manually placed upon the surface while it is still wet.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile