Disc handling system and method

Abstract

Systems for handling discs, such as semiconductor wafers and the like, using both stationary and movable air track assemblies include an elongate track member, a flat surface formed to extend along the underside of the track member, ports disposed along the flat undersurface for the discharge of air at an angle to the vertical, and provision for discharging a sufficient flow of air from the ports to create a differential in the air pressure above and below the discs so as to lift the discs toward the flat undersurface as a result of the air flow. The angle has a sufficient horizontal vectorial component to urge the discs along the flat undersurface of the track member in the direction of such component. In one embodiment, the air track member extends between a pair of holders which respectively supply and receive discs carried by the track member. The discs may be carried to a predetermined fixed point, released, and subsequently retrieved from the same position. Alternatively, a cyclic carrier may be employed to move the discs out from under the track member. In another embodiment, a cyclic carrier cooperates with a number of air track assemblies, each of which includes only a single holder lacted at one end to either supply or receive discs. A further embodiment includes a pair of movable air track members operable with respect to a stationary location for depositing and retrieving discs therefrom.