The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 1980
Filed:
Dec. 11, 1978
Herbert E Mayer, Eschen, LI;
CENSOR patent- und Versuchs-Anstalt, Vaduz, LI;
Abstract
A device for fixing a planar work piece in position, particularly a semiconductor used in processing cycles for the production of integrated circuits. Said device having a supporting plane, a number of apertures being disposed in said supporting plane, said apertures being under reduced pressure, said work piece being pressed against said supporting plane by means of said reduced pressure. Said device being particularly suitable for precisely fixing a semiconductor substrate in the supporting plane, even in the case of extensive raised areas or warps on the lower side of the substrate. A number of independent reduced pressure systems are provided, said reduced pressure systems being connected with individual apertures or groups of apertures.