The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 1980

Filed:

Mar. 07, 1979
Applicant:
Inventors:

Bodo Dreisbach, Bad Toelz, DE;

Karl Eidling, Egling, DE;

Assignee:

Siemens Aktiengesellschaft, Berlin & Munich, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356244 ; 356352 ;
Abstract

A unit for use with an interferometer for measuring the planeness of thin, stiff disks and has asuction means for maintaining the disks in flat abutment with an equalizer plate which is adjustable by means of micrometer spindles to move an opposite side of the disk into flat abutment with a reference plate. The equalizer plate, spindles and suction grid are supported on a base plate which is axially rotatable about a column for movement from underneath the reference plate to place the disks on the suction grid. A clamping means is provided around the column to hold the assembly in a fixed, rigid position.


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