The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 1980
Filed:
Feb. 15, 1979
Applicant:
Inventors:
Mitsuo Sakakura, Saitama, JP;
Tetsuo Takaku, Tsurugashima, JP;
Assignee:
Toko, Inc., Saitama, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
2041 / ; 252 629 ;
Abstract
In a method of fabricating a piezoelectric thin film of zinc oxide by means of a sputtering process, zinc and alkaline earth metal are sputtered together in an oxygen atmosphere to thereby produce zinc oxide containing the alkaline earth metal.
Sakakura, Mitsuo. (1980). Method of fabricating piezoelectric thin film (U.S. Patent No. 4233135). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4233135
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile