The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 1980
Filed:
Aug. 21, 1978
Applicant:
Inventors:
Tadao Konishi, Katsuta, JP;
Yoshiharu Utsumi, Tokyo, JP;
Assignee:
Hitachi, Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M / ;
U.S. Cl.
CPC ...
250311 ; 250451 ;
Abstract
A sample is bidimensionally scanned with an electron beam to display an image of the sample based on a secondary-electron signal generated from the sample. Two marks corresponding to two points on the sample are displayed in superposition to the image and a distance between the two points on the sample is calculated based on coordinates of the marks and a tilting angle of the sample to the electron beam.